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Cimetrix_SECS_GEM_Stds_WP_July_2016
- SECS GEM标准白皮书 有助于了解SECS GEM标准 适合初学者了解协议 有利快速开发(SECS GEM standard white paper It helps to understand the SECS GEM standard Suitable for beginners to understand the protocol Favorable for rapid development)